Inspection Tool

The KLA-2138 is used for critical measurements and other demanding inspection applications. The system detects all yield-relevant defect types on all process layers, at speeds required for high-volume wafer production. The product features an ultra broadband (UBB) illumination source and a Segmented Auto Threshold (SAT) technology. The result is an improvement over previous models in defect detection sensitivity, as well as faster setup times, faster throughput, and improved wafer alignment reliability. The tool is available with optional IMPACT/Online automatic defect classification software and an integrated SMIF mini-environment.

KLA-Tencor, 160 Rio Robles, San Jose, CA 95134. Phone: 408-875-4200; Fax: 408-571-3030.