Keithley Parametric Test solution for copper/low-k processes and 300mm wafers

Keithley Instruments (Cleveland, OH) introduced the S633, an Automated Parametric Test solution for semiconductor processes using copper interconnects, low-k dielectrics, and 300mm wafers. Keithley's S633 is a multi-generational, integrated solution set consisting of field-proven test capability, test structure design, prober interfacing, automation, and technical expertise needed to deal with the new developments in semiconductor fabrication. The S633 can:

• Rapidly characterize copper interconnects. It includes a package of test algorithms and programs optimized for accurate measurement of critical copper process control parameters. The system's accuracy and repeatability facilitate measurement of copper line widths of 0.18 micrometers, 0.13 micrometers, and smaller, as well as detection of structure defects unique to copper processes. Keithley, in partnership with leading probe card manufacturers, has implemented a probing solution for copper pads that automates the detection of probe-to-pad contact, minimizes probe overdrive, and maximizes contact. Keithley also offers automatic probe tip tracking and cleaning to save time and maintain high data integrity during production testing.
  
• Capture and characterize low-k process anomalies: As device geometries shrink and copper is integrated, low-k dielectrics have become critical to reducing capacitance between interconnects, thus supporting higher device speeds and densities. This trend continues to push the envelope for capacitance measurement well beyond the requirements for aluminum/silicon dioxide processes. The S633 performs femtofarad-level capacitance measurements to capture and characterize low-k process anomalies with high speed and high repeatability.
  
• Provide 300mm parametric coverage at 200mm test times: The S633's Optitest software uses conditional probing, conditional testing, adaptive test and site selection to deliver increased coverage with no test time increase.

An SECS-II/GEM interface, compliant to SEMI Standards (such as E4, E5, E10, E30, E37, and additional 300mm standards), ensures compatibility with standard protocols for tool-to-tool and network communication. User Access Points (UAPs) in the Keithley Test Environment (KTE) software simplify integration of the S633 into different fab environments. Other automation options include automated recipe management, automatic probe card identification, and data handling. These enable Keithley to deliver an integrated yield learning environment during pilot runs and production.

Keithley offers assistance in setup and implementation, including test structure design, test programs, process expertise for copper and low-k, training courses, and applications support configured to meet specific customer requirements.

The starting price of the S633 Parametric Test System is $300,000, with availability in November 2000.

Keithley Instruments, Inc., 28775 Aurora Road, Cleveland, OH 44139-1891. Tel: 888-KEITHLEY (534-8453) or 440-248-0400; Fax: 440-248-6168.

Edited by Paul O'Shea
Managing Editor, TestandMeasurement.com