MEMS Test Systems
Source: SUSS MicroTec
SUSS is the pioneer in wafer level test equipment for the MEMS market...
SUSS is the pioneer in wafer level test equipment for the MEMS market.
Wafer level solutions for:
- Pressure & Gas Sensors
- Acceleration Sensors
- Microbolometers
- RF MEMS
- Microphones
- and many more
SUSS MicroTec and Danish Electronics, Light & Acoustics (DELTA) have teamed up in a special collaboration project to develop new test techniques and equipment which enable the direct application of non-electrical input to each individual die, as well as measure non-electrical output. Examples include light, pressure, motion, acceleration, temperature and sound. The SUSS family of analytical probe systems can test MEMS at wafer level, diced or undiced, on bonded wafer components, or in their final package.
Click here to download a brochure in PDF format.