Metrology Software Offers 2-D and 3-D Plots, Histograms for Semiconductor Industry

Boin GmbH, a start-up company located in Tomerdingen, Germany, announced the shipment of a company-wide site license of its metrology software WAFERMAP to STEAG RTP Systems GmbH, a leading supplier of Rapid Thermal Processing (RTP) systems.

WAFERMAP, which runs under Windows 95 and NT4.0, will be used by STEAG process engineers for off-line metrology data analysis and visualization. It allows for importing of data files from metrology equipment, such as ellipsometers and four point probes, as well as many other metrology tools used throughout the semiconductor industry. Data can be visualized and printed as 1-D, 2-D (contour) or 3-D plots or as histograms. The software also includes an interface to STEAG RTP Systems´ 'OPUS' optimization software package.

Besides activities for WAFERMAP OEM licenses for metrology equipment suppliers, the company is also concentrating on sales and marketing of the product to end users: Typical end users are process and metrology engineers in wafer fabs and at equipment manufacturers. A free evaluation copy of WAFERMAP can be downloaded from: http://www.boin-gmbh.com.

Boin GmbH, Phone: +49 (0) 7348-928233; Fax: +49 (0) 7348-928234