Beaverton, OR - CyberOptics Semiconductor (CSI) recently announced that Novellus Systems has placed multiple orders for CSI's WaferSense Automatic Gapping System for use with Novellus VECTOR Express and VECTOR Extreme, Plasma Enhanced Chemical Vapor Deposition (PECVD) Systems.
In PECVD systems, the gap between the showerhead and the semiconductor wafer plays a critical role in determining the uniformity of the deposited film. CSI's WaferSense Automatic Gapping System uses patent pending capacitive sensors to wirelessly provide real-time feedback through Cyberoptics' GapView application software. With this tool, service engineers can quickly measure and adjust showerhead-to-platen gaps to significantly improve dielectric film uniformity and repeatability.
CyberOptics Semiconductor, developer of the gapping tool and other WaferSense precision metrology devices, collaborated with Novellus Systems to refine and customize its tool for use in Novellus' VECTOR PECVD systems. The real-time data provided by the Automatic Gapping System enables Novellus engineers to speed up maintenance cycles by as much as 60 percent.
"As an equipment supplier to the highly competitive semiconductor industry, Novellus is constantly looking for ways to make our equipment more productive for our customers," said Tim Archer, senior vice president and general manager of Novellus' PECVD Business Unit. "By arming our engineers with CyberOptics' innovative Automatic Gapping System, we have been able to deliver industry-leading dielectric film uniformity on VECTOR and at the same time significantly reduce maintenance costs and system downtime."
"Increasing process tool accuracy and precision is critical for 300mm fabs," said Craig Ramsey, general manager of CyberOptics Semiconductor. "We are extremely pleased to have had the opportunity to collaborate with Novellus during the development of this WaferSense application. The Novellus action to equip their engineers with Automatic Gapping Systems underscores the value these tools deliver to semiconductor fabricators worldwide."
The Automatic Gapping System is now available through Novellus and CyberOptics Semiconductor.
SOURCE: CyberOptics Semiconductor