Product/Service

Proforma AutoScan 200 Semiconductor Wafer Measurement System

Source: MTI Instruments, Inc.
Fully Automated Wafer Measurement System for Semiconducting and Semi-insulating Materials
Fully Automated Wafer Measurement System for Semiconducting and Semi-insulating Materials

    TT. Thickness, TTV, Bow, Warp, Resistivity, Site and Glbal Flatness
    UU. Outstanding Accuracy
    VV. Integrated Design

SYSTEM FEATURES...

    WW. Exclusive MTI Instruments capacitance sensors
    XX. Measures all materials including Si, GaAs, Ge, InP, SiC
    YY. 100 wafers/hour throughput
    ZZ. Integrated control PC
    AAA. Modular design for future upgrades
    BBB. Enclosed environment for Class 10 compatibility
    CCC. SEMI S2-0200 health and safety compliant design
    DDD. SEMI S8-0999 ergonomic compliant design
    EEE. Integrated casters and leveling feet for portability
    FFF. Optional laser OCR mark reading and resistivity module

Modular Design
The Proforma™ AutoScan 200 is a fully automated measurement system capable of determining:

    GGG. Thickness
    HHH. Site flatness
    III. Global flatness
    JJJ. Resistivity
    KKK. TTV
    LLL. Bow
    MMM. Warp

Based on MTI's exclusive Push-Pull capacitance technology, the AutoScan 200 delivers full wafer surface scanning with throughputs of up to 100 wafers per hour. The Autoscan provides highly accurate, repeatable measurements of both semiconducting and semi-insulating wafers from 75 mm to 200 mm in diameter. User-defined and ASTM/SEMI scan patterns are used to generate full 3-dimensional wafer images. To improve system upgradability and ease of service, the AutoScan takes full advantage of its modular design. Optional equipment is quickly and easily installed, maximizing system uptime.

Versatile Standard Features
The AutoScan 200 comes standard with two cassette stands that can be defined as input or output stations. An additional cassette stand is also available for greater capacity or wafer sorting. The Class 10 compatible pick and place robotic handling system is equipped with laser cassette scanning for non-contact detection of empty slots, crossovers and broken wafers. The integrated wafer pre-aligner is capable of detecting all SEMI standard notches and flats.

To maximize available space, the AutoScan 200 is designed to deliver maximum capability with a minimal footprint. The Windows NT® -based controller PC built into the system offers three levels of security, from a production environment to full engineering analysis of wafer geometry. An on-board RJ-45 connector enables easy data transfer to any network, while an integrated Iomega ® zip drive adds data storage and backup capability.

MTI Instruments, Inc., 325 Washington Avenue Extension, Albany, NY 12205-5505. Tel: 518-218-2550; Fax: 518-218-2506.