ZYGO Announces Advanced Film Capability Enabling Consolidation Of Process Control Equipment
Middlefield, CT - Zygo Corporation recently announced that it has introduced Advanced Film Capability ("AFC") to its line of fully automated in-fab wafer metrology tools. This new technology module enables measurement of multilayer films in addition to topography of complex film stacks for in-line process control of semiconductor manufacturing. This introduction extends ZYGO's strategy of lowering cost of ownership to semiconductor manufacturers by combining multiple measurements in a single sensor.
AFC extends the functionality of ZYGO's single sensor, noncontact, and fully automated wafer metrology products by adding ellipsometric film thickness and optical characteristic measurement capability. Presently, chipmakers and thin film head manufacturers use multiple tools to address process control of topography and thickness of complex film stacks. ZYGO technologists have addressed the challenges of thin film effects and material dispersion by integrating AFC into its single sensor platforms. The combination of sub-angstrom topography measurement with high resolution ellipsometric film metrology provides ZYGO semiconductor customers with a means to make accurate measurements and maintain control of their processes. AFC delivers multi-angle, multi-wavelength ellipsometric film thickness metrology with an industry-leading small spot size. This provides the additional benefit of allowing customers to utilize smaller test targets for production monitoring at the 32nm process node and beyond, thereby allowing improvement in both process yield and chip density.
"The introduction of Advanced Film Capability is a significant technology milestone for ZYGO. AFC opens up new opportunities for ZYGO's noncontact optical metrology," comments Michael Darwin, ZYGO's Vice President, Semiconductor Solutions Business Unit. "Customers want low cost-of-ownership, nondestructive process control, and in-line metrology equipment designed for high volume production. AFC not only provides the industry's leading edge small spot ellipsometer, but also enhances surface topography beyond traditional approaches."
SOURCE: Zygo Corporation